The MKS R-Series Vacuum Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R Series gate valve is available with a range of options, including pneumatic and manual actuators, lockout tagout capability, and position indicators. The R Series gate valve employs an elastomer shaft seal in place of a bellows seal, which enables high performance in a cost effective, high value package for roughing vacuum applications.
DN80, DN100, and DN160 sizes
Stainless steel or aluminum versions
Allows roughing pump to stay in operation during foreline maintenance
GVRA
Gate Valve, Roughing Pump and Roughing Line Isolation, R Series
r-series-gate-valves - Drawings & CAD
Additional CAD file downloads are not available for this product.
r-series-gate-valves - Drawings
Additional drawings are not available for this product.
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DN80: 200,000 cycles before maintenance DN100: 200,000 cycles before maintenance DN160: 100,000 cycles before maintenance MTTR: 15 minutes; Can be serviced without removal from vacuum system
DN80: 200,000 cycles before maintenance DN100: 200,000 cycles before maintenance DN160: 100,000 cycles before maintenance MTTR: 15 minutes; Can be serviced without removal from vacuum system
Features
Complete Roughing Pump Isolation Solution
Cost effective
High value
High Performance Heating Option
Excellent temperature uniformity ensures no cold spots on internal surfaces
Prevents condensation of effluents and corrosive gases
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